Details
Tantalum sputtering targets、Tantalum- tungsten Alloy targets
Material:RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W)
Size: circular targets:Diameter 15mm up to 400mm x Thickness 3mm up to 28mm
rectangular targets:Thickness 1mm up to 40mm x Width up to 1000mm x Length up to 3000mm
Table 1. Chemical composition:
Chemistry% | |||||||||||||
Designation | Chief component | Imurities maxmium | |||||||||||
Ta | Nb | Fe | Si | Ni | W | Mo | Ti | Nb | O | C | H | N | |
Ta1 | Remainder | - | 0.004 | 0.003 | 0.002 | 0.004 | 0.004 | 0.002 | 0.03 | 0.010 | 0.004 | 0.0015 | 0.002 |
Ta1 | Remainder | - | 0.01 | 0.01 | 0.005 | 0.02 | 0.02 | 0.005 | 0.08 | 0.015 | 0.01 | 0.0015 |
0.01 |
TaNb3 | Remainder | 3.5 | 0.01 | 0.01 | 0.005 | 0.02 | 0.02 | 0.005 | - | 0.015 | 0.01 | 0.0015 | 0.01 |
TaNb20 | Remainder | 17.0-23.0 | 0.01 | 0.01 | 0.005 | 0.02 | 0.02 | 0.005 | - | 0.015 | 0.01 | 0.0015 | 0.01 |
Ta2.5W | Remainder | - | 0.005 | 0.003 | 0.002 | 3.0 | 0.006 | 0.002 | 0.04 | 0.015 | 0.005 | 0.0015 | 0.006 |
Ta10W | Remainder | - | 0.005 | 0.003 | 0.002 | 11 | 0.006 | 0.002 | 0.04 | 0.015 | 0.005 | 0.0015 | 0.006 |
Special requirements to be agreed on by the supplier and buyer of negotiations |
Special sizes are available, please contact sales for inquiries.
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